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This RP covers procedures for calibrating and verifying equipment used in characterizing cleanrooms and for determining intervals of calibration. The RP includes general procedures for calibrating photometers, aerosol generators, and anemometers. Where available, references for calibrating other instruments are provided.

Product Details

Published:

10/16/2006

ISBN(s):

9780978786847

Number of Pages:

23

File Size:

1 file , 1000 KB