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Technical Guide 1002 supplements the coverage of procedures for determining the concentration of ultrafine particles as provided by ISO 14644-1. Procedures presented in this Guide are suitable for classification (in accordance with ISO 14644-1)and monitoring (in accordance with ISO 14644-2) of cleanroom and clean zone environments that would typically qualify as ISO Class 4 or cleaner. This guide describes the apparatus and procedures necessary for determining the U descriptor and provides guidelines and an example format for reporting data.

Product Details

Published:

12/01/1999

ISBN(s):

9781877862755

Number of Pages:

13

File Size:

1 file , 650 KB