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This Recommended Practice (RP) addresses the sizing and counting of submicrometer liquid-borne particles using optical discrete-partical counters with a focus on applications in the semiconductor, flat-panel display, and data storage industries. Liquid-borne particle measurement involves many technical challenges that can substantially affect results in both sizing and counting of particles. This RP is intended as a single source covering those challenges and solutions and provides a handy reference for professionals in this field.

Product Details

Published:

10/01/2011

ISBN(s):

9780915414475, 9780915414093

Number of Pages:

32

File Size:

1 file , 1.2 MB